2025 SMSI Bannerklein

A6.3 Higher-Mode Contact Resonance Operation of a High-Aspect- Ratio Piezoresistive Cantilever Microprobe

Event
SMSI 2020
-
(did not take place because of Covid-19 virus pandemic)
Band
SMSI 2020 - Sensors and Instrumentation
Chapter
A6 MEMS Sensors
Author(s)
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany)
Pages
89 - 90
DOI
10.5162/SMSI2020/A6.3
ISBN
978-3-9819376-2-6
Price
free

Abstract

In this work, a long slender MEMS cantilever sensor for higher-order contact resonance tactile-sensing applications is described. The design is focused on enabling high-speed measurements on large workpieces. To excite high-order out-of-plane bending modes of the cantilever, heating resistors integrated into the sensor are used as actuators. Their positions are optimized to allow for an efficient resonant excitation of the sensor, as confirmed by finite-element modelling (FEM).

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