D6.1 - Multiplexing interferometers to provide novel capabilities for nanometrology
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- D6 - Nanomeasurements and Nanofabrication
- Author(s)
- T. Kissinger - Technische Universität Ilmenau, Ilmenau (Germany)
- Pages
- 239 - 240
- DOI
- 10.5162/SMSI2023/D6.1
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
Multiplexing interferometers within a single beam, based on their optical path difference, using laser wavelength-modulated signal processing techniques such as the range-resolved interferometry method, allows for interesting new capabilities in precision interferometry. For example, these include single-beam differential interferometry or position encoders with multiple degrees-of-freedoms using only a single fibre-coupled access port.