D6.3 - Recent progress on AFM te chniques for traceable 3D nanometrology at PTB
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- D6 - Nanomeasurements and Nanofabrication
- Author(s)
- G. Dai, J. Thiesler, J. Degenhardt - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), R. Tutsch - Technical University of Braunschweig, Braunschweig (Germany)
- Pages
- 243 - 244
- DOI
- 10.5162/SMSI2023/D6.3
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
This paper presents an overview on recent research progress achieved at PTB for reference 3D nanometrology: (1) development of a new low noise 3D-AFM, which has combined measurement modes of CD-AFM and tilting-AFM in one instrument; (2) accurate calibration of the tip form with a new trace-ability route using the silicon lattice parameter which is suggested by the Mise en pratique for the realisation of the Metre in nanometrology; (3) development of a novel true 3D AFM probe, referred to as a 3D-Nanoprobe, which has quasi-isotropic stiffness in three directions and is thus more powerful for detecting 3D tip-sample interaction forces in AFM measurements.