7.3 - Novel Miniaturized Thermoelectric Hydrogen Pressure Sensor
- Event
- iCCC2024 - iCampµs Cottbus Conference
2024-05-14 - 2024-05-16
Cottbus - Band
- Vorträge
- Chapter
- Sensorik & Messtechnik
- Author(s)
- P. Raimann, M. Ahsan, F. Hedrich, S. Billat, A. Dehé - Hahn-Schickard, Villingen-Schwenningen
- Pages
- 100 - 103
- DOI
- 10.5162/iCCC2024/7.3
- ISBN
- 978-3-910600-00-3
- Price
- free
Abstract
In conventional hydrogen pressure sensors, the stress-sensitive diaphragm is the weakest point in terms of construction. Leading to signal drift of the sensor as hydrogen causes material embrittlement and permeation. We address this issue by using a miniaturized gas pressure sensor without a me-chanical transducer. Our sensor structure consists of a heating element and thermopiles arranged in a thin perforated silicon nitride membrane. In the thermal domain, the structure exhibits a characteristic low-pass behavior whose phase shift is dependent on the hydrogen pressure. A dynamically excited heating element and the evaluation of the thermopile responses are used to measure pressures rang-ing from 100 and 2850 kPa. So far, this is the highest measurement range detected with a thermal pressure sensor that has ever been published in literature. Compared to diaphragm-based MEMS pressure sensors, this chip design offers an intrinsic overload protection as well as low-cost fabrication and simple packaging requirements.