8.3 - Optofluidic biosensors with Si-based photonic integrated circuit technology
- Event
- iCCC2024 - iCampµs Cottbus Conference
2024-05-14 - 2024-05-16
Cottbus - Band
- Vorträge
- Chapter
- Material-& Prozesstechnologien
- Author(s)
- P. Steglich, M. Paul, G. Lecci, C. Schumann - HyPhoX, Wildau, A. Mai - Technische Hochschule Wildau, Wildau
- Pages
- 112 - 115
- DOI
- 10.5162/iCCC2024/8.3
- ISBN
- 978-3-910600-00-3
- Price
- free
Abstract
This study reports a cost-effective optofluidic system achieved by monolithically integrating a microfluidic channel into a photonic integrated circuit technology. Alongside a photonic biosensor based on a silicon micro-ring resonator, we present findings on the feasibility and reproducibility on wafer-level of the integrated optofluidic system. The photonic biosensor is fabricated on a 200 mm silicon-on-insulator technology platform. While the photonic biosensor is structured from the top of the wafer, the microfluidic channel is introduced locally through a backside release process, utilizing a combination of dry and wet etching. In this way, the photonic biosensor in the front-end of line as well as the metal interconnects in the back-end of line can be fabricated in a mature photonic integrated circuit technology within a small area saving extensive costs for production.