OT5.107 - Silicon-Based Thermal Conductivity Detector for Gas Sensing
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT5 - Chemical Sensors
- Author(s)
- A. Teulle, M. Baret, M. Jurdit, F. Ricoul, J. B. Tissot - Université Grenoble Alpes, Grenoble (France)
- Pages
- 109 - 110
- DOI
- 10.5162/EUROSENSORSXXXVI/OT5.107
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
We present a novel Thermal Conductivity Detector (TCD) for gas sensing without the use of a chromatography column. Its original architecture is based on a suspended membrane on top of which are deposited a heating element and a separated sensing element made of amorphous silicon. These sensors are micro-fabricated and tested in a climatic chamber. They reach a theoretical detection limit (3 sigma) of 13 ppm for carbon dioxide in air and exhibit a signal-to-noise ratio 4 times higher than conventional platinum TCDs.