OT5.232 - Raman Spectroscopy-based Detection of Suspended Carbon Nanotubes for Integration into Sensors
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT5 - Chemical Sensors
- Author(s)
- I. Kraiem, N. Monnerat, C. Roman, C. Hierold, M. Haluska - ETH Zürich, Zürich (Switzerland)
- Pages
- 135 - 136
- DOI
- 10.5162/EUROSENSORSXXXVI/OT5.232
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
In this study, the visualization of CVD grown suspended CNTs intended for individual carbon nanotube field effect transistor gas sensors was investigated. Two visualization techniques were compared: SEM and Raman spectroscopy. By comparing the CNT visibility by the 514 nm laser wavelength of Raman spectroscopy to the CNT visibility in SEM, a detection yield of 90.3% by Raman was determined. For the CNT detectability by Raman, both G and D* Raman bands were considered.