P09 - Characterization and Modeling of Thermal MEMS for Selective Determination of Gas Properties
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- P. Raimann, S. Billat, F. Hedrich - Hahn-Schickard, Villingen-Schwenningen (Germany), A. Dehé - University of Freiburg, Villingen-Schwenningen (Germany)
- Pages
- 298 - 299
- DOI
- 10.5162/SMSI2023/P09
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
This work presents the characterization and modeling of thermal MEMS for the determination of gas properties. The sensor consists of thermopiles arranged on a membrane, which allow the determina-tion of the gas property-dependent temperature response of an electrically excited heating element. Experimental data are used to demonstrate the applicability of a lumped-model for the modeling of a thermoelectric gas property sensor. The calculated sensor’s sensitivity for small quantities of hydrogen in nitrogen is about 0.7mV per % H2 at a heating power of 6 mW.