P31 - Thin quartz resonators as detector element for thermal infrared sensors
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- A. Eydam, G. Gerlach, V. Norkus - Technische Universität Dresden, Dresden (Germany)
- Pages
- 340 - 341
- DOI
- 10.5162/SMSI2023/P31
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
In this work, we describe the technology and packaging of a quartz sensor with a thickness of 5 μm. The temperature dependence of the resonance frequency of quartz resonators can be used for thermal radiation sensors. The sensitive element in the form of a bowl or a cantilever is ion beam etched and must be able to vibrate freely. Impedance measurements show the vibration of the 5 μm thick resonators, however highly damped and with a low quality factor.