P41 - A MEMS micromachined low cost microheater platform for applications in thermal sensors
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- A. Laades, C. Heinze, L. Long, D. Karolewski, J. Baldauf, T. Klein, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH Erfurt (Germany)
- Pages
- 360 - 361
- DOI
- 10.5162/SMSI2023/P41
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
We developed a low-cost thin membrane based microheater platform (MHP) as scalable basic unit for thermal sensors. The MHP consisting of thin membranes supporting the microheater and temperature sensors is CMOS/MEMS compatible and features high performance characteristics such as controllable temperature distribution and low power consumption.