P53 - Concept for improving the form measurement results of aspheres and freeform surfaces in a Tilted-Wave Interferometer
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- G. Scholz, I. Fortmeier, M. Schake, M. Schulz - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
- Pages
- 382 - 383
- DOI
- 10.5162/SMSI2023/P53
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
Non-null-test interferometry, such as tilted-wave interferometry, has gained attention for accurate and flexible form measurement of aspherical and freeform surfaces. However, additional information is needed to improve the measurement results and distinguish between certain form errors and misalignment of the specimen. One way to achieve this is to improve the knowledge about the absolute measurement position of the specimen within the interferometer setup. In this work, we propose a method to measure the specimen-to-objective distance by utilizing a white light interferometer and a transparent test specimen.