OT1.20 - Acoustic Transmission Measurements of Folded MEMS Membranes for Mechanical Characterization
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT1 - Theory, Modelling, Design and Testing
- Author(s)
- D. Becker, M. Littwin, A. Bittner, A. Dehé - Hahn-Schickard, Villingen-Schwenningen (Germany)
- Pages
- 25 - 26
- DOI
- 10.5162/EUROSENSORSXXXVI/OT1.20
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
Three-dimensional folded membranes are set to innovate MEMS designs for acoustic transducers by using lateral movement to increase their active area. Determination of the mechanical characteristics of such membranes is challenging, since established techniques mainly target in-plane structures. This paper presents an acoustic method to determine the mechanical compliances of such folded membranes. The results show compliances between 0.08∙10-15 and 10∙10-15 m3/Pa for different mem-brane lengths.