OT1.175 - Design of a MEMS Pitch Tunable Grating for Enhanced Scanning LiDAR
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT1 - Theory, Modelling, Design and Testing
- Author(s)
- I. Jafarsadeghi Pournaki, A. Michael, H. Pota - The University of New South Wales, Canberra (Australia)
- Pages
- 35 - 36
- DOI
- 10.5162/EUROSENSORSXXXVI/OT1.175
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper introduces a high-performance MEMS (micro-electro-mechanical systems) pitch tunable grating (PTG) as a LiDAR (light detection and ranging) sensor. While the challenges associated with its integration into self-driving cars are addressed, its potential application extends beyond this specif-ic domain. Electrostatic-based comb actuators are employed to drive the device. To delay side pull-in instability attributed to this transduction mechanisms, an innovative flexural configuration is employed, extending the stable travel range up to 135 μm, resulting in a broad pitch tuning of 2.25 μm. The initial diffraction angles for the first two orders before actuation were ±2.8° and ±5.5°; moreover, this re-markable pitch tuning resulted in a significant increase in the angle of the first and second orders, reaching 0.4° and 0.8°, respectively.