OT1.36 - KNN Lead-free biaxial piezoelectric MEMS Mirror on 200 mm Si wafer
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT1 - Theory, Modelling, Design and Testing
- Author(s)
- L. Mollard, C. Dieppedale, A. Hamelin, G. Le Rhun - University Grenoble Alpes, Grenoble (France)
- Pages
- 27 - 28
- DOI
- 10.5162/EUROSENSORSXXXVI/OT1.36
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This work presents the first KNN-biaxial non-resonant MEMS mirrors manufactured on 200 mm silicon substrate. The performances of the biaxial MEMS mirrors with reflector diameters ranging from 0.5x0.5 to 2x2 mm², integrating 1-μm thick sputtered potassium sodium niobate (K0.3Na0.7)NbO3 pie-zoelectric thin film from Sumitomo Chemicals, are presented. These mirrors, which exhibit rotational resonant frequency of 32.5 kHz, 7.5 kHz and 1.92 kHz, have been tested in non-resonant mode at 200 Hz and at higher frequencies. An optical angle of up to 6° can be obtained depending on the driving frequency.