PT1.41 - On the Tunability of Resonant MEMS Sensor Subject to Blue Sideband Excitation
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT1 - Theory, Modelling, Design and Testing
- Author(s)
- E. Uka, C. Zhao - University of York, York (United Kingdom), C. Lin, J. Chen - Shanghai University, Shanghai (China)
- Pages
- 225 - 226
- DOI
- 10.5162/EUROSENSORSXXXVI/PT1.41
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This work describes a new method and parameters by which the amplitude-frequency characteristics and sensitivity of a resonant MEMS sensor subject to the recently proposed blue sideband excitation (BSE) can be tuned. We show that the sensitivity of the BSE-based resonant MEMS sensor can be improved by 3 times via suppressing the intrinsic Duffing nonlinearity coefficient of the resonator. This paves the way for a new paradigm for highly sensitive and programmable multi-mode MEMS sensors.