PT1.204 - Design and Simulation of Quartz-on-Silicon Bulk Acoustic Waves Resonator for High Sensitivity Multiplex Biosensor
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT1 - Theory, Modelling, Design and Testing
- Author(s)
- M. Hamidullah, A. Oseev, F. Chollet - Thérèse Leblois Université de Franche-Comté, Besançon (France)
- Pages
- 237 - 238
- DOI
- 10.5162/EUROSENSORSXXXVI/PT1.204
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
We designed and simulated bulk acoustic waves (BAW) resonators based on a Quartz-on-Silicon substrate to achieve higher operating frequency than the standard commercially available Quartz Mi-crobalance (QCM) biosensor. We used reflectors, based on Silicon multi-wall structures, to concen-trate the acoustic energy within the individual transducer area, thus increasing the quality factor and preventing the crosstalk between adjacent sensors. The overall design will allow the application of BAW resonators for in-liquid biosensor arrays with higher sensitivity and multiplex sensing capability