PT1.9 - Microbridge Resonators: Reducing Pull-in Voltage with Preserving Resonant Frequency
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT1 - Theory, Modelling, Design and Testing
- Author(s)
- H. Nazemi, Y. Elnemr, A. Emadi - University of Windsor, Ontario (Canada)
- Pages
- 225 - 226
- DOI
- 10.5162/EUROSENSORSXXXVI/PT1.9
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This work introduces a unique microbridge resonator topology that is designed and developed to ef-fectively reduce the device pull-in voltage by 16%. An analytical model incorporating the ratio between microbridge length and bottom electrode is presented, and finite element analysis is conducted using COMSOL Multiphysics. The proposed designs are fabricated utilizing a Multi-User MEMS sacrificial process and electrically characterized to demonstrate the approach.