PT7.123 - The power of using combinatorial materials science and finite element methods in the optimization of sensing by gold nanostructures
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT7 - Photonics and Optical Microsystems
- Author(s)
- P. Petrik, D. Mukherjee, K. Kertész, Z. Zolnai, Z. Kovács, A. Deák, A. Pálinkás, Z. Osváth, D. Olasz, A. Romanenko, M. Fried - , , G. Sáfrán - Institute of Technical Physics and Materials Science, Budapest (Hungary)
- Pages
- 477 - 478
- DOI
- 10.5162/EUROSENSORSXXXVI/PT7.123
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
Gold nanostructures were created using combinatorial magnetron sputtering and annealing, as well as by electron beam lithography to create nanostructures for plasmonic and Raman sensing. The optical response of the structures was measured by reflectometry, Raman spectroscopy and spectroscopic ellipsometry to study the accuracy of dimensional metrology and the performance of the structures for sensing. The structure was analyzed based on finite element calculations supported by electron micros-copy measurements. The sensing performance of the deposited nanoparticles was explained by the density and size distribution on the surface as a function of the amount of deposited material. The meas-urements and finite element models on the grating structures revealed the most sensitive parameter ranges for dimensional metrology and sensing performance of the structures.