PT7.301 - Last developments in the angular response and defor-mation characterization of resonant micromirrors
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT7 - Photonics and Optical Microsystems
- Author(s)
- C. Fleury, M. H. Khan, D. Mori, S. Guerreiro, R. Tumolin Rocha, D. Holzmann, T. Sasaki, A. Piot - Silicon Austria Labs GmbH, Graz (Austria)
- Pages
- 487 - 488
- DOI
- 10.5162/EUROSENSORSXXXVI/PT7.301
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
Characterization of micromirror in terms of optical performance during actuation has always been chal-lenging. Two years ago, we introduced a method that makes use of digital holography and variable mirror positioning to sample the shape of the mirror at an arbitrary position in its movement. Here we present further development of the technique, including a methodology to perform fast frequency sweeps. We demonstrate the capabilities by comparing the deformation to analytical derivation from amplitude and frequency.