P1.1.17 Integration of carbon nanotubes to three-dimensional C-MEMS for glucose sensors
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P1.1 Biosensors
- Author(s)
- S. Xi, T. Shi, L. Zhang, D. Liu, H. Long, S. Liu, Z. Tang - State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology (China)
- Pages
- 859 - 862
- DOI
- 10.5162/IMCS2012/P1.1.17
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A novel design and fabrication of glucose sensors based on carbon nanotubes (CNT) integrated with carbon microelectromechanical system (C-MEMS) were reported in this work. Photolithography of CNT mixed SU-8 photoresist and the self-assembly of CNTs during the developing process were followed by the controlled pyrolysis process to form CNT integrated three-dimensional C-MEMS electrode array. Immobilization of enzyme onto these electrodes was carried out through co-deposition of glucose oxidase (GOx) and electrochemically polymerized polypyrrole (PPy) for glucose sensor. Sensing performance with different electrodeposition time and various glucose concentration were tested and compared. The results revealed that the C-MEMS/CNT based glucose sensor increased approximately two order of magnitude in sensitivity compared with blank C-MEMS one, demonstrating linear range for glucose concentrations from 1 mM to 15 mM with fast response.