OT4.62 - Development of a 0.01-dph mode-matched MEMS gyroscope toward realizing a module-level gyrocompass with 1-mil accuracy
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- H. Murase, D. Ono, F. Miyazaki, J. Ogawa, T. Tomioka, K. Uchida, K. Masunishi, E. Ogawa, Y. Tomizawa, F. Ishibashi - Toshiba Corporate R&D Center, Kawasaki (Japan)
- Pages
- 65 - 66
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.62
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
A gyrocompass, which measures the earth’s rotation with a gyroscope, can detect north robustly. However, practical applications of gyrocompasses are limited due to the size of conventional gyroscopes. Micro-electro-mechanical systems (MEMS) gyroscopes have the potential to open up new markets; however, precision is a major challenge in MEMS gyroscopes. Here, we developed a novel high-precision MEMS gyroscope and demonstrated navigation-grade bias instability of <0.01 dph, which is the highest-level performance of a MEMS gyroscope. A gyrocompass using the developed gyroscope performed north finding with precision of <1 mil in a laboratory environment, and a precision of <10 mil was exhibited by our module-level gyrocompass, which is being refined toward realizing 1-mil accuracy.