OT4.169 - A Novel Barometric Pressure Sensor with a Capacitive Transducer and with Improved Mechanical Robustness in a Media Robust Packaging
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- F. Lukács - Robert Bosch Kft, Budapest (Hungary)
- Pages
- 77 - 78
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.169
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper reports a novel barometric pressure sensor with a capacitive transducer for consumer application. The concept of the MEMS chip and the improvement in performance compared to the previous generation of pressure sensor are shown. Furthermore, bumpers were designed with the help of Finite Element Analysis (FEA) to improve the mechanical robustness of the transducer. Finally, by putting the MEMS chip into a media robust package further challenges raised that were investigated with FEA and solved with a novel packaging process.