OT4.235 - A High-Performance Mode-Localized Vacuum Gauge Based on T-Typed Piezoresistive Pickup
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- J. Qin, B. Xie, J. Wang, D. Chen, Y. Lu - Chinese Academy of Sciences, Beijing (China)
- Pages
- 85 - 86
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.235
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper presents a high-performance MEMS vacuum gauge based on mode localization within 2 –1000 Pa from 0 °C to 60 °C. Since the noise of the pickup signal decides the maximum amplitude ratio output and the sensitivity. A two-degree-of-freedom weak coupling resonator based on H-typed DETF resonator and T-typed piezoresistive strain pickup is developed. Results show that it has the advantages of large power-handling and high signal-to-noise ratio. The device equipped with that has a sensitivity of 280000 ppm/Pa and a lower limit of 2.00 Pa which is superior to previous works.