OT4.209 - Ultra-Sensitive Force Gauge Accessory for Microscope Micromanipulators
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- J. Volk, J. M. Bozorádi, F. B., A. Nagy, L. Illés, J. Radó - HUN-REN Centre for Energy Research, Budapest (Hungary)
- Pages
- 81 - 82
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.209
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
Micromanipulators equipped with sharp needles are now indispensable tools for ultra-sensitive operations under the optical or electron microscope, which are mainly visually guided. Measuring the local mechanical forces acting on probe tip can give another important feedback to the operator, or to the closed-loop actuators in automated systems. However, measuring contact forces, especially as a vector quantity, is highly challenging. In this work, we present a lightweight, compact, two-dimensional piezoresistive MEMS sensor-based system, that can be mounted on the tip of a commercially available 3-axis piezo-actuated micromanipulator. As the calibration with an atomic force microscopy probe reveled the sensitivity of the sensor is a few µN at an electric response of 29 µV/µN. To demonstrate the capability of system, in-situ static tests were carried out on an Pt micorwire.