OT4.215 - Scalable Microfabrication of Graphene Polymeric Strain Gauge
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- F. Sayar Irani, M. C. Tasdelen, M. K. Yapici - Sabanci University, Istanbul (Turkey)
- Pages
- 83 - 84
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.215
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper presents the fabrication and characterization of a strain gauge based on chemical vapor deposition (CVD)-grown graphene integrated to an epoxy-based, photo-patternable and flexible SU-8 cantilever for sensing applications. The fabrication process involved a standard semiconductor microfabrication process to create ser-pentine-shaped graphene and gold/graphene sensing layers on a polymeric SU-8 layer. The performance of the strain gauge was evaluated by subjecting it to controlled bending, demonstrating a gauge factor (GF) of 2.73 and fast response time (0.55 s) affirming the viability of the fabricated strain gauge for practical sensing applications.