OT4.138 - Exploring multi-mass system for multi-functional MEMS accelerometer with enhanced bandwidth and sensitivity
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- I. S. Garcia, M. Saleem, F. Mota, N. Castro, P. Valentim, F. Khan, D. E. Aguiam, R. A. Dias, F. S. Alves - International Iberian Nanotechnology Laboratory, Braga (Portugal)
- Pages
- 75 - 76
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.138
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper presents the design, fabrication, and experimental validation of a novel multi-mass MEMS accelerometer concept to achieve higher mechanical sensitivity with wide operational frequency band-width, in comparison to traditional single-mass MEMS accelerometers. The initial results show that the proposed approach has the potential to develop multi-functional MEMS accelerometers, with a preliminary device with 5.6 kHz resonance and more than 30% sensitivity improvement.