OT4.72 - Design Considerations for GHz SAW Resonators in High Strain Sensing
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT4 - Physical Sensors and Actuators
- Author(s)
- M. Kwon, M. Schlögl, D. Platz, U. Schmid - TU Wien, Vienna (Austria)
- Pages
- 67 - 68
- DOI
- 10.5162/EUROSENSORSXXXVI/OT4.72
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
In this study, SAW (surface acoustic wave) resonators are investigated for strain sensing up to values of approximately -4000 με to 4000 με. The shift in resonance frequency in the GHz range is evaluated for this purpose. To estimate the impact of a key design parameter, we adjust the length of the SAW resonator and find that the longer the SAW resonator, the more responsive the device gets to strain changes. When the distance between the two reflectors confining the SAW is 2207 μm, the resonance frequency responsivity to strain is 105.17 Hz/με.