PT4.12 - SNR Enhancement of a MEMS Thermal Acoustic Pressure Sensor
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- A. Gupta, A. Bittner, A. Dehé - Hahn-Schickard, Villingen-Schwenningen (Germany
- Pages
- 291 - 292
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.12
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
In this work, we investigate the different internal noise mechanism affecting the performance of our MEMS based dynamic pressure sensor based on thermal anemometric principle [1]. We present sensi-tivity and noise measurements for two different chip designs for a comparative analysis with theoretical values. Finally, we show that the design modification resulted in the enhancement of the Signal to Noise ratio (SNR) by 30 dB and the dynamic pressure detection lower limit by a factor by 20 dBSPL.