PT4.23 - A New Area Efficient Folded Piezoelectric MEMS Speaker
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- D. Becker, A. Bittner, A. Dehé - Hahn-Schickard, Villingen-Schwenningen (Germany), R. Scharf, C. Döring, A. Merz - Robert Bosch GmbH, Renningen (Germany)
- Pages
- 293 - 294
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.23
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper demonstrates a novel concept for an area efficient piezoelectric MEMS speaker. A folded piezoelectric diaphragm can utilize the whole chip volume by adding up multiple laterally vibrating actuators. The actuation is accomplished by conformally deposited aluminum nitride (AlN) layers, which are fabricated using atomic layer deposition (ALD). This work describes the design, functionality and first performance of a MEMS speaker. Acoustic measurements show a sound pressure level (SPL) of 59 dB in a 0.13 cm3 big coupled volume.