PT4.193 - Directivity and distance dependence of generated pressure field of bistable PMUTs
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- M. Schneider, M. Mortada, U. Schmid - TU Wien, Vienna (Austria), D. Mayrhofer, M. Kaltenbacher - TU Graz, Graz (Austria)
- Pages
- 307 - 308
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.193
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This work presents both the directivity pattern and distance dependence of the pressure field of a pie-zoelectric micromachined ultrasonic transducer (PMUT). The PMUT comprises a silicon membrane and an integrated piezoelectric transducer based on aluminum nitride (AlN). It exploits bistability to achieve large membrane displacements during switching between both ground states.