PT4.194 - Sic micro hot wires for flow measurement in harsh environments
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- S. Kern, A. Mazzamurro, C. Ghouila-Houri, D. Hourlier, L. Tandt, P. Pernod, A. Talbi - University of Lille, Lille (France)
- Pages
- 302 - 303
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.194
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
The present study deals with an integrated effort in the process of fabricating a silicon carbide-based micromachined device for measuring turbulent airflow in harsh environments, involving SiC etching and silicon substrate under-etching to create the MEMS structure. These SiC-based MEMS structures have been electrically and thermally characterized, with resistance and TCR measurements vs. tem-perature.