PT4.66 - Improvement of temperature stability in MEMS differential resonant accelerometer by G-T correction
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- K. Masunishi, E. Ogawa, D. Ono, F. Miyazaki, K. Uchida, J. Ogawa, H. Murase, F. Ishibashi, Y. Tomizawa - Toshiba Corporate R&D Center, Kawasaki (Japan)
- Pages
- 297 - 298
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.66
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This paper presents a method for reducing temperature drift in MEMS differential resonant accelerom-eter (DRA). Conventionally, the difference in resonant frequency between two beams is utilized to elim-inate the effect of temperature. However, the temperature coefficients of frequency (TCf) of the two beams do not match perfectly, resulting in temperature drift. G-T correction was performed to account for the difference in TCf. The measured Allan deviation was BI > 1 μG for the differential correction, and a highly accurate bias instability of BI < 500 nG was achieved by applying G-T correction.