PT4.212 - Thermally Actuated Colloidal Tip SU-8 Scanning Probes
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Poster
- Chapter
- PT4 - Physical Sensors and Actuators
- Author(s)
- A. H. Shafaghi, R. Bajwa, M. Umar, M. K. Yapici - Sabanci University, Istanbul (Turkey)
- Pages
- 313 - 314
- DOI
- 10.5162/EUROSENSORSXXXVI/PT4.212
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
This study focusses on advancements in microfabrication techniques for the development of cantile-vers with various tip geometries and microspheres attached to the tip of the cantilever for various ap-plications. Furthermore, the integration of bimorph electrothermal actuators for cantilever actuation was explored. Moreover, using SU-8 as a cantilever material and the thermal actuator's passive layer simplifies fabrication process. In addition, its properties make it suitable for biomedical applications due to biocompatibility, broadening its potential use beyond this study.