OT6.89 - Fabrication of Nanochannels with Funnel-like Inlet Structures for the Analysis of Single DNA Molecules
- Event
- EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary) - Band
- Lectures
- Chapter
- OT6 - Biochemical sensors, Microfluidics, Lab-on-a-Chip and Organ-On-Chip Systems
- Author(s)
- N. Hintz, M. Hübner - Robert Bosch GmbH, Renningen (Germany), C. Johnson - Robert Bosch LCC, Sunnyvale (USA)
- Pages
- 161 - 162
- DOI
- 10.5162/EUROSENSORSXXXVI/OT6.89
- ISBN
- 978-3-910600-03-4
- Price
- free
Abstract
A new fabrication method for realizing fluidic nanochannels with funnel-like inlet structures in silicon technology is presented. Nanochannels are a useful tool for DNA analysis since the molecules must first be linearized to enter the nanochannels and the linearization is a prerequisite for DNA mapping or sequencing. Inlet structures, like funnels, help guiding the DNA and bringing it into the channels. The nanochannels demonstrated in this work are realized using standard MEMS processes and photolithography, enabling cheap and scalable production for a wide range of biotechnology applications.